Trifluoromethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Trifluoromethane is an important etching gas in the plasma etching process of the electronics industry.


Product Description

Chemical Name Trifluoromethane
Synonyms Fluoroform, Fluoryl, Freon 23, Arcton 1,

HFC-23, R-23

CAS # 75-46-7
ELINCS # (EU) 200-872-4
Molecular Formula CHF3
Structure CHF3
Molecular Weight 70.01
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 12400
Atmospheric Life Time (Years) 270
TWA(8-hr, mg/m3) 2.5


Physical & Chemical Properties

Chemical Name Trifluoromethane
Boiling Point(℃) -82.1
Melting Point(℃) -155.2
Liquid Density(-82.1℃, g/cm3) 1.431
Vapor Density (Air=1) 2.417
Saturated Vapor Pressure(@20℃, MPa) 4.38
Critical Temperature(℃) 25.7
Critical Pressure(MPa) 4.816
Critical Density (mol/L) 7.52
Solubility in Water(@20℃, g/L) 1
Flash Point(℃) Not applicable (non-flammable)
Flammability Not applicable (non-flammable)
Explosion Limit(%vol) Not applicable (non-flammable)


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