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Trifluoromethane

Trifluoromethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Trifluoromethane
Synonyms Fluoroform, Fluoryl, Freon 23, Arcton 1,

HFC-23, R-23
CAS # 75-46-7
ELINCS # (EU) 200-872-4
Molecular Formula CHF3
Structure CHF3
Molecular Weight 70.01
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 12400
Atmospheric Life Time (Years) 270
TWA（8-hr, mg/m3） 2.5

 

Physical & Chemical Properties

Chemical Name Trifluoromethane
Boiling Point(℃) -82.1
Melting Point（℃） -155.2
Liquid Density（-82.1℃, g/cm3） 1.431
Vapor Density (Air=1) 2.417
Saturated Vapor Pressure（@20℃, MPa） 4.38
Critical Temperature（℃） 25.7
Critical Pressure（MPa） 4.816
Critical Density （mol/L) 7.52
Solubility in Water（@20℃, g/L） 1
Flash Point（℃） Not applicable (non-flammable)
Flammability Not applicable (non-flammable)
Explosion Limit（%vol) Not applicable (non-flammable)

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 320 / CGA 660 / DISS 716 7kg
44L CGA 320 / CGA 660 / DISS 716 30kg
47L CGA 320 / CGA 660 / DISS 716 32kg

 

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