Trifluoromethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  

Trifluoromethane

Trifluoromethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Trifluoromethane
Synonyms Fluoroform, Fluoryl, Freon 23, Arcton 1,

HFC-23, R-23

CAS # 75-46-7
ELINCS # (EU) 200-872-4
Molecular Formula CHF3
Structure CHF3
Molecular Weight 70.01
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 12400
Atmospheric Life Time (Years) 270
TWA(8-hr, mg/m3) 2.5

 

Physical & Chemical Properties

Chemical Name Trifluoromethane
Boiling Point(℃) -82.1
Melting Point(℃) -155.2
Liquid Density(-82.1℃, g/cm3) 1.431
Vapor Density (Air=1) 2.417
Saturated Vapor Pressure(@20℃, MPa) 4.38
Critical Temperature(℃) 25.7
Critical Pressure(MPa) 4.816
Critical Density (mol/L) 7.52
Solubility in Water(@20℃, g/L) 1
Flash Point(℃) Not applicable (non-flammable)
Flammability Not applicable (non-flammable)
Explosion Limit(%vol) Not applicable (non-flammable)

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 320 / CGA 660 / DISS 716 7kg
44L CGA 320 / CGA 660 / DISS 716 30kg
47L CGA 320 / CGA 660 / DISS 716 32kg

 

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