Tetrafluoromethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Tetrafluoromethane is a colorless, odorless, non-flammable, compressible gas that is insoluble in water. Electronic grade carbon tetrafluoride is currently one of the main plasma etching gases in the semiconductor industry, mainly used for etching silicon, silicon dioxide, silicon nitride, metal silicide and certain metals.


Product Description

Chemical Name Tetrafluoromethane
Synonyms Perfluorocarbons, tetrafluoromethane,

CFC 14, Dragon 14, R-14

CAS # 75-73-0
ELINCS # (EU) 200-896-5
Molecular Formula CF4
Structure CF4
Molecular Weight 88.00
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 7390
Atmospheric Life Time (years) 50,000
TWA(8-hr, mg/m³) 2.5


Physical & Chemical Properties

Chemical Name Tetrafluoromethane
Boiling Point(℃) -127.8
Melting Point(℃) -183.6
Liquid Density(-127.8℃, g/cm3) 1.603
Vapor Density (Air=1) 0.97
Saturated Vapor Pressure(15℃, MPa) 3.65
Critical Temperature(℃) -45.5
Critical Pressure(bar) 37.43
Critical Volume(dm3/mol) 0.412
Solubility in Water Insoluble
Flash Point(℃) Not applicable (non-flammable)
Flammability(@21℃)  Not applicable (non-flammable)
Explosion Limit(%vol)  Not applicable (non-flammable)


Product Specification

Purity 99.9% 99.99%


Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 580 / DISS 320 7kg
44L CGA 580 / DISS 320 30kg
47L CGA 580 / DISS 320 32kg


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