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Pentafluoroethane

Pentafluoroethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Pentafluoroethane
Synonyms HFC 125, Khladon 125, Suva 125, Freon 125,

R-125
CAS # 354-33-6
ELINCS # (EU) 206-557-8
Molecular Formula C2HF5
Structure CF3CHF2
Molecular Weight 120.02
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 675
Life Time (Years) 5
TWA（8-hr） 2.5

 

Physical & Chemical Properties

Chemical Name Pentafluoroethane
Boiling Point(℃) -48.5
Melting Point（℃） -103
Liquid Density（-48.5℃, g/cm³） 1.53
Vapor Density (Air=1) 4.2
Saturated Vapor Pressure（@20℃, kPa） 1414.05
Critical Temperature（℃） 66.05
Critical Pressure（MPa） 3.592
Critical Density (g/cm³) 0.571
Solubility in water (25℃, mg/l) 1071
Flash Point（℃） Not applicable (non-flammable)
Flammability (@21℃) Not applicable (non-flammable)
Explosion Limit（%vol) Not applicable (non-flammable)

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 8kg
44L CGA 350 / DISS 724 40kg
47L CGA 350 / DISS 724 45kg

 

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