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Pentafluoroethane is an important etching gas in the plasma etching process of the electronics industry.
Chemical Name | Pentafluoroethane |
Synonyms | HFC 125, Khladon 125, Suva 125, Freon 125,
R-125 |
CAS # | 354-33-6 |
ELINCS # (EU) | 206-557-8 |
Molecular Formula | C2HF5 |
Structure | CF3CHF2 |
Molecular Weight | 120.02 |
ODP(CFC-11 = 1) | 0 |
GWP100(CO2 = 1) | 675 |
Life Time (Years) | 5 |
TWA(8-hr) | 2.5 |
Chemical Name | Pentafluoroethane |
Boiling Point(℃) | -48.5 |
Melting Point(℃) | -103 |
Liquid Density(-48.5℃, g/cm³) | 1.53 |
Vapor Density (Air=1) | 4.2 |
Saturated Vapor Pressure(@20℃, kPa) | 1414.05 |
Critical Temperature(℃) | 66.05 |
Critical Pressure(MPa) | 3.592 |
Critical Density (g/cm³) | 0.571 |
Solubility in water (25℃, mg/l) | 1071 |
Flash Point(℃) | Not applicable (non-flammable) |
Flammability (@21℃) | Not applicable (non-flammable) |
Explosion Limit(%vol) | Not applicable (non-flammable) |
Purity | 99.9% | 99.99% |
Cylinder Size | Valve Type | Filling Weight |
10.2L | CGA 350 / DISS 724 | 8kg |
44L | CGA 350 / DISS 724 | 40kg |
47L | CGA 350 / DISS 724 | 45kg |
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