Pentafluoroethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Pentafluoroethane is an important etching gas in the plasma etching process of the electronics industry.


Product Description

Chemical Name Pentafluoroethane
Synonyms HFC 125, Khladon 125, Suva 125, Freon 125,


CAS # 354-33-6
ELINCS # (EU) 206-557-8
Molecular Formula C2HF5
Structure CF3CHF2
Molecular Weight 120.02
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 675
Life Time (Years) 5
TWA(8-hr) 2.5


Physical & Chemical Properties

Chemical Name Pentafluoroethane
Boiling Point(℃) -48.5
Melting Point(℃) -103
Liquid Density(-48.5℃, g/cm³) 1.53
Vapor Density (Air=1) 4.2
Saturated Vapor Pressure(@20℃, kPa) 1414.05
Critical Temperature(℃) 66.05
Critical Pressure(MPa) 3.592
Critical Density (g/cm³) 0.571
Solubility in water (25℃, mg/l) 1071
Flash Point(℃) Not applicable (non-flammable)
Flammability (@21℃) Not applicable (non-flammable)
Explosion Limit(%vol) Not applicable (non-flammable)

Product Specification

Purity 99.9% 99.99%


Packing Specification

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