Pentafluoroethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  

Pentafluoroethane

Pentafluoroethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Pentafluoroethane
Synonyms HFC 125, Khladon 125, Suva 125, Freon 125,

R-125

CAS # 354-33-6
ELINCS # (EU) 206-557-8
Molecular Formula C2HF5
Structure CF3CHF2
Molecular Weight 120.02
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 675
Life Time (Years) 5
TWA(8-hr) 2.5

 

Physical & Chemical Properties

Chemical Name Pentafluoroethane
Boiling Point(℃) -48.5
Melting Point(℃) -103
Liquid Density(-48.5℃, g/cm³) 1.53
Vapor Density (Air=1) 4.2
Saturated Vapor Pressure(@20℃, kPa) 1414.05
Critical Temperature(℃) 66.05
Critical Pressure(MPa) 3.592
Critical Density (g/cm³) 0.571
Solubility in water (25℃, mg/l) 1071
Flash Point(℃) Not applicable (non-flammable)
Flammability (@21℃) Not applicable (non-flammable)
Explosion Limit(%vol) Not applicable (non-flammable)

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 8kg
44L CGA 350 / DISS 724 40kg
47L CGA 350 / DISS 724 45kg

 

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