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Hexafluoro-1,3-butadiene

Hexafluoro-1,3-butadiene (C4F6) is an environmentally friendly dry etching gas with low GWP, high etching rate, high selectivity and high aspect ratio, showing very high performance for critical plasma etching in semiconductor devices manufacturing.

                   

Product Description

Chemical Name Hexafluoro-1,3-butadiene
Synonyms Perfluorobutadiene
CAS # 685-63-2
ELINCS # (EU) 211-681-0
Molecular Formula C4F6
Structure CF2=CF-CF=CF2

 

Physical & Chemical Properties

Chemical Name Hexafluoro-1,3-butadiene
Molecular Weight 162
Boiling Point(℃) 6
Vapor Pressure (bar, @0℃） 19.65
Critical Temperature（℃） 136.75
Critical Pressure (kPa） 3131
Liquid Density (g/ml) 1.553
GWP (100 Years) < 1
ODP 0

Product Specification

Purity 99.9% 99.99%

  

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg

 

 

Low GWP

 

The global warming potential of C4F6 is less than 1, and has a much shorter lifetime in the atmosphere.

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