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Electronic Gases for Etching

November 18th 2022

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What are Electronic Gases?

Electronic gases are utilized in the production of microelectronic components as well as in semiconductor processing operations like as etching, chamber cleaning, packing, RTP, and soldering. Thin films can also be deposited using physical vapor deposition or chemical vapor deposition. Pure gases or gas mixes can both be used as electronic gases. For particularly specific applications including wafer manufacture, crystal growth, thermal diffusion, oxidation, and ion implantation, the electronic gas mixes can be proportioned.

To etch silicon dioxide or polysilicon, for instance, a pure halocarbon gas can be mixed with oxygen. It can also be used with another halocarbon to clean chambers and wafers. Ammonia, arsine, boron trichloride, chlorine, the halocarbons, and silane are a few examples of electronic gases. Electronic gases are sometimes employed in measurement and process control application, as either liquid or gas.

Etching Process

Wet and dry etching are both used in the manufacturing of electronics, but for distinct procedures. In wet etching, huge volumes of material are swiftly removed, or a specific material is fully removed using aqueous solutions of acids or bases. Dry etching removes a part of a material more precisely and accurately than wet etching by using plasma-activated etchant gases, which typically contain halogen atoms. Common types of dry etching is reactive-ion etching and plasma etching.

Transistors and capacitors are only two examples of the numerous different circuit components included in electronic devices. Each of these components are constructed using distinct methods of material deposition, patterning, and etching to create three-dimensional structures out of various materials. In order to reduce contamination and enhance the reactions, the majority of these procedures are carried out in a high-vacuum, ultraclean chamber.

Electronic Gas Purity

In contrast to industrial applications, the purity of a material sets it apart for usage in the production of electronics. These gases are refined to a purity of 99.99% or higher via distillation and absorption. The supplier of the materials is in charge of ensuring uniform purification and analysis from the source material, which may have several different, international origins.

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