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Difluoromethane

Difluoromethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Difluoromethane
Synonyms Carbon difluoride, HFC-32, R32
CAS # 75-10-5
ELINCS # (EU) 200-839-4
Molecular Formula CH2F2
Structure CH2F2
Molecular Weight 52.02
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 675
Atmospheric Life Time (Years) 5
TWA（8-hr, mg/m³） 2.5

 

Physical & Chemical Properties

Chemical Name Difluoromethane
Boiling Point(℃) -52
Melting Point（℃） -136
Liquid Density（g/cm³,） 1.1
Vapor Density (Air=1) 3.82
Saturated Vapor Pressure（21.1℃, kPa） 1518.92
Critical Temperature（℃） 78.45
Critical Pressure（MPa） 5.83
Critical Density (g/cm³) 0.43
Solubility in water (g/l) >1.68
Flash Point（℃） Not applicable
Flammability Combustible
Explosion Limit（%vol) 13-33 

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

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