Difluoromethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Difluoromethane is an important etching gas in the plasma etching process of the electronics industry.


Product Description

Chemical Name Difluoromethane
Synonyms Carbon difluoride, HFC-32, R32
CAS # 75-10-5
ELINCS # (EU) 200-839-4
Molecular Formula CH2F2
Structure CH2F2
Molecular Weight 52.02
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 675
Atmospheric Life Time (Years) 5
TWA(8-hr, mg/m³) 2.5


Physical & Chemical Properties

Chemical Name Difluoromethane
Boiling Point(℃) -52
Melting Point(℃) -136
Liquid Density(g/cm³,) 1.1
Vapor Density (Air=1) 3.82
Saturated Vapor Pressure(21.1℃, kPa) 1518.92
Critical Temperature(℃) 78.45
Critical Pressure(MPa) 5.83
Critical Density (g/cm³) 0.43
Solubility in water (g/l) >1.68
Flash Point(℃) Not applicable
Flammability Combustible
Explosion Limit(%vol) 13-33 

Product Specification

Purity 99.9% 99.99%


Packing Specification

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