3,3,3,4,4,4-Hexafluoroisobutylene - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Hexafluoroisobutylene (HFIB) is an environmentally friendly dry etching gas with low GWP, mainly used in front end etching process of semiconductor.


Product Description

Chemical Name Hexafluoroisobutylene
Synonyms 2-Trifluoromethyl-3,3,3-trifluoropropene; HFIB
CAS # 382-10-5
ELINCS # (EU) 206-840-6
Molecular Formula C4H2F6
Molecular Weight 164.05


Physical & Chemical Properties

Chemical Name Hexafluoroisobutylene
Boiling Point(℃) 14.5
Liquid Density(@20℃) 1.39
Solubility(@20℃) 0.23


Product Specification

Purity 99.9% 99.99%


Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg


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