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3,3,3,4,4,4-Hexafluoroisobutylene

Hexafluoroisobutylene (HFIB) is an environmentally friendly dry etching gas with low GWP, mainly used in front end etching process of semiconductor.

                   

Product Description

Chemical Name Hexafluoroisobutylene
Synonyms 2-Trifluoromethyl-3,3,3-trifluoropropene; HFIB
CAS # 382-10-5
ELINCS # (EU) 206-840-6
Molecular Formula C4H2F6
Molecular Weight 164.05

 

Physical & Chemical Properties

Chemical Name Hexafluoroisobutylene
Boiling Point(℃) 14.5
Liquid Density（@20℃） 1.39
Solubility（@20℃） 0.23

 

Product Specification

Purity 99.9% 99.99%

  

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg

 

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