1,1,1,3,3,3-Hexafluoropropane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


1,1,1,3,3,3-Hexafluoropropane (HFC-236fa) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.


Product Description

Chemical Name 1,1,1,3,3,3-Hexafluoropropane
Synonyms HFC-236fa
CAS # 690-39-1
ELINCS # (EU) 614-909-0
Molecular Formula C3H2F6
Structure CF3CH2CF3
Molecular Weight 152.04
Physical State Gas
Color Colorless
Odor Odorless
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 1330
Life Time (Days) 11
TWA(8-hr) 1000 ppm


Physical & Chemical Properties

Chemical Name 1,1,1,3,3,3-Hexafluoropropane
Boiling Point(℃) -1.4
Melting Point(℃) -103
Liquid Density(@20℃) 1.36
Vapor Pressure(@25℃,KPa) 272.4
Critical Temperature(℃) 124.9
Solubility(@20℃) 2100
Flash Point(℃) Not applicable
Flammability(@21℃) Not applicable
Explosion Limit(%vol) Not applicable


Product Specification

Purity 99.9% 99.99%


 Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg


Request A Quote

Our business is most valuable when it helps our customers. Please fill out the form with as much detail as possible so we can respond with the most helpful solution.