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HFO-1336mzz(E) is a non-ozone depletion, non-flammable, low global warming potential (GWP) environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
Chemical Name | Trans-1,1,1,4,4,4-Hexafluoro-2-butene |
Synonyms | HFO-1336mzz(E) |
CAS # | 66711-86-2 |
ELINCS # (EU) | 811-213-0 |
Molecular Formula | C4H2F6 |
Structure | CF3CH=CHCF3 |
Molecular Weight | 164.05 |
Physical State | Gas |
Color | Colorless |
Odor | Odorless |
ODP(CFC-11 = 1) | 0 |
GWP100(CO2 = 1) | 7 |
Life Time (Days) | 67 |
TWA(8-hr) | 400 ppm |
Chemical Name | Trans-1,1,1,4,4,4-Hexafluoro-2-butene |
Boiling Point(℃) | 7.5 |
Melting Point(℃) | <-20 |
Liquid Density(@20℃) | 1.31 |
Gas Density (Air=1) | 5.3 |
Vapor Pressure(@20℃) | 163.52 |
Critical Temperature(℃) | 130.2 |
Critical Pressure(bar) | 36.36 |
Critical Density (kg/m3) | 489 |
Solubility(@20℃) | 0.28 |
Flash Point(℃) | Not applicable |
Flammability(@21℃) | Not applicable |
Explosion Limit(%vol) | Not applicable |
Purity | 99.9% | 99.99% |
Cylinder Size | Valve Type | Filling Weight |
10.2L | CGA 660 / DISS 716 | 10kg |
44L | CGA 660 / DISS 716 | 44kg |
47L | CGA 660 / DISS 716 | 47kg |
Our business is most valuable when it helps our customers. Please fill out the form with as much detail as possible so we can respond with the most helpful solution.