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HFO-1336mzz(E)

HFO-1336mzz(E) is a non-ozone depletion, non-flammable, low global warming potential (GWP) environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

                   

Product Description

Chemical Name Trans-1,1,1,4,4,4-Hexafluoro-2-butene
Synonyms HFO-1336mzz(E)
CAS # 66711-86-2
ELINCS # (EU) 811-213-0
Molecular Formula C4H2F6
Structure CF3CH=CHCF3
Molecular Weight 164.05
Physical State Gas
Color Colorless
Odor Odorless
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 7
Life Time (Days) 67
TWA（8-hr） 400 ppm

 

Physical & Chemical Properties

Chemical Name Trans-1,1,1,4,4,4-Hexafluoro-2-butene
Boiling Point(℃) 7.5
Melting Point（℃） ＜-20
Liquid Density（@20℃） 1.31
Gas Density (Air=1) 5.3
Vapor Pressure（@20℃） 163.52
Critical Temperature（℃） 130.2
Critical Pressure（bar） 36.36
Critical Density （kg/m3） 489
Solubility（@20℃） 0.28
Flash Point（℃） Not applicable
Flammability（@21℃） Not applicable
Explosion Limit（%vol) Not applicable

 

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 660 / DISS 716 10kg
44L CGA 660 / DISS 716 44kg
47L CGA 660 / DISS 716 47kg

 

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