Carbonyl fluoride is a highly toxic and irritating gas with a strong irritating effect on the skin and the mucous membranes of the respiratory tract. It is soluble in water and ethanol. It has a molecular weight of 66.01 and can be used as cleaning gas and etching gas for semiconductor manufacturing devices, fluorinated gas and raw materials for organic compounds and intermediates for organic synthesis, fluorinated agents, and as cleaning gas for semiconductor manufacturing devices requiring high purity COF2.