COF2 - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  


Carbonyl fluoride is a highly toxic and irritating gas with a strong irritating effect on the skin and the mucous membranes of the respiratory tract. It is soluble in water and ethanol. It has a molecular weight of 66.01 and can be used as cleaning gas and etching gas for semiconductor manufacturing devices, fluorinated gas and raw materials for organic compounds and intermediates for organic synthesis, fluorinated agents, and as cleaning gas for semiconductor manufacturing devices requiring high purity COF2.


Product Description

Chemical Name Carbonic difluoride
Synonyms Carbonylfluoride (6CI,8CI);Carbon difluoride oxide;

Carbon fluoride oxide (COF2);Carbon oxyfluoride;

CAS # 353-50-4
ELINCS # (EU) 206-534-2
Molecular Formula COF2
Molecular Weight 66.01
Physical state Gas
Color Colorless
Odor Pungent Odor


Physical & Chemical Properties

Chemical Name Carbonic difluoride
Boiling Point(℃) -84
Melting Point(℃) -114
Gas Density(g/cm3) 1139
Solubility Soluble
Flash Point(℃) Not applicable
Flammability(@21℃) Not applicable
Explosion Limit(%vol) Not applicable



Product Specification

Purity 99.9% 99.99%

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