HFO-1336mzz(E)

HFO-1336mzz(E) is a non-ozone depletion, non-flammable, low global warming potential (GWP) environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

                   

Product Description

Chemical Name Trans-1,1,1,4,4,4-Hexafluoro-2-butene
Synonyms HFO-1336mzz(E)
CAS # 66711-86-2
ELINCS # (EU) 811-213-0
Molecular Formula C4H2F6
Structure CF3CH=CHCF3
Molecular Weight 164.05
Physical State Gas
Color Colorless
Odor Odorless
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 7
Life Time (Days) 67
TWA(8-hr) 400 ppm

 

Physical & Chemical Properties

Chemical Name Trans-1,1,1,4,4,4-Hexafluoro-2-butene
Boiling Point(℃) 7.5
Melting Point(℃) <-20
Liquid Density(@20℃) 1.31
Gas Density(Air=1) 5.3
Vapor Pressure(@20℃) 163.52
Vapor Thermal conductivity(@25℃,mW/m·K) 11.5
Critical Temperature(℃) 130.2
Critical Pressure(bar) 36.36
Critical Density (kg/m3) 489
Solubility(@20℃) 0.28
Flash Point(℃) Not applicable
Flammability(@21℃) Not applicable
Explosion Limit(%vol) Not applicable

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 660 / DISS 716 10kg
44L CGA 660 / DISS 716 44kg
47L CGA 660 / DISS 716 47kg

 

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