1,1,1,2,3,3-Hexafluoropropane

1,1,1,2,3,3-Hexafluoropropane (HFC-236ea) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

                   

Product Description

Chemical Name 1,1,1,2,3,3-Hexafluoropropane
Synonyms HFC-236ea
CAS # 431-63-0
ELINCS # (EU) 207-076-6
Molecular Formula C3H2F6
Structure CF3CFH2CF2
Molecular Weight 152.04
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 1330
Life Time (Days) 11

 

Physical & Chemical Properties

Chemical Name 1,1,1,2,3,3-Hexafluoropropane
Boiling Point(℃) 6.19
Critical Temperature(℃) 139.29
Critical Pressure(bar) 3.5

 

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg

 

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