1,1,1,3,3,3-Hexafluoropropane

1,1,1,3,3,3-Hexafluoropropane (HFC-236fa) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.

                   

Product Description

Chemical Name 1,1,1,3,3,3-Hexafluoropropane
Synonyms HFC-236fa
CAS # 690-39-1
ELINCS # (EU) 614-909-0
Molecular Formula C3H2F6
Structure CF3CH2CF3
Molecular Weight 152.04
Physical State Gas
Color Colorless
Odor Odorless
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 1330
Life Time (Days) 11
TWA(8-hr) 1000 ppm

 

Physical & Chemical Properties

Chemical Name 1,1,1,3,3,3-Hexafluoropropane
Boiling Point(℃) -1.4
Melting Point(℃) -103
Liquid Density(@20℃) 1.36
Vapor Pressure(@25℃,KPa) 272.4
Critical Temperature(℃) 124.9
Solubility(@20℃) 2100
Flash Point(℃) Not applicable
Flammability(@21℃) Not applicable
Explosion Limit(%vol) Not applicable

 

Product Specification

Purity 99.9% 99.99%

 

 Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 350 / DISS 724 10kg
44L CGA 350 / DISS 724 44kg
47L CGA 350 / DISS 724 47kg

 

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