Methyl Fluoride

Methyl Fluoride (CH3F) is an environmentally friendly dry etching gas with low GWP, showing very high performance in etching process of semiconductor and electronic products.

                   

Product Description

Chemical Name Methyl Fluoride
Synonyms HFC-41
CAS # 593-53-3
ELINCS # (EU) 209-796-6
Molecular Formula CH3F
Structure CH3-F
Molecular Weight 34.03
ODP(CFC-11 = 1) 0
GWP100(CO2 = 1) 116
Life Time (Days) 2.8

 

Physical & Chemical Properties

Chemical Name Methyl Fluoride
Boiling Point(℃) -78.4
Melting Point(℃) -142
Liquid Density(@20℃) 0.61
Gas Density (Air=1) 1.2
Vapor Pressure(@20℃,bar) 33
Critical Temperature(℃) 44.5

 

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
7L CGA 350 / DISS 724 3kg
16L CGA 350 / DISS 724 7kg
44L CGA 350 / DISS 724 18kg

 

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